BPSG (AMAT-P5000) 105,000원/wf. 105,000원/1.0um 추가, BSG/PSG/USG: 500nm 이하 a-Si, ACL (AMAT-P5000) 105,000원/wf. 105,000원/500nm 추가 MEMS PECVD 105,000원/wf. 70,000원/500nm 추가. 350℃ 미만, 1um 이상 별도 23 CVD-W P-5000 110,000원/wf 24 HDP NOVELLUS SPEED 105,000원/wf. 105,000원/1um 추가. AMAT P5000, Centura, Centura II Etch, CVD and Endura 5500 PVD and Mirra CMP System Series Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service Lam Research Rainbow, TCP, A6 Etch System Series.
QuickTour to Clean Room Facility CleanRoom Lease and Warehousing Service Available Clean Room Facility (450kWPower, DIW, PCW, CDA) for EquipmentRefurbishment/Manufacturing near Samsung FAB Complex (5mins driving distance), Seoul (30mins driving distance) and Incheon Int'lAirport (90mins driving distance) in Korea On-Site Solar Power GenerationSystem for Energy Saving | Used/RefurbishedEquipment Inventory List Last updated on February 23, 2021 |
For Sale Now - Featured Tools
Note : Please click todownload Configuration/Specification Files
todownload Picture Files
todownload Movie/Video Files
todownload Technical Datasheet Files
<< Lithography - Flow Monitoring Solutions for Resist Cost Down and Process Failure Avoidance >>
(Resist Volume Cost Down, Real-Time Process Monitoring withAlarm/Interlock to avoid Process Accident such as Wafer Scraps)
Amat P5000 Cvd Manual Pdf
Photo Resist, SOG/SOD, Solvent (EBR,Back Rinse, Solvent Bath, Cup Rinse, Nozzle Rinse), Develop Solutions,DIW Top Rinse, etc.- Available for All Photo Tracks including
TEL Lithius, Lithius Pro
Sokudo
TEL Clean Track Mark 7, Mark 8, ACT 8 or ACT 12
DNS 60A, 60B, 80A, 80B, SK200W, SK2000.
SVG 86, 88, 90, 90-S, 90-SE
Tazmo SEMIX SOG Coater
- Multi Recipe Support (MAX 20 Recipes per Dispense Nozzle)
- Interchangeable with TEL OEM Fin Flow Sensor for TEL Clean Track ACT 8 and ACT 12
System Details :
A. Single Tool/Machine Application :
- USB Connection to 1 Laptop for 1 Tool/Machine
- MAX 8 Spin Units, 32 Sensors with 4 Interface Controllers via USB Hub (4 Ports)
- 1 Band Output : 1 Upper Limit(Alarm or Interlock) and 1 Lower Limit (Alarm/Warning or Interlock/Stop)
- FDC Option Support Available
B. Multi Tools/Machines Groupware Application :
- Ethernet Connection to Laptops and Main Server via Access Point and Ethernet Hub
- MAX 250 Tools interconnected
- MAX 300 Sensors per Tool (MAX 120Spin Units) with 15 Interface Controller (1 Main Controller + 1 Add-on Controller)
which support Both Digital Pulse Sensor Input and Analog Sensor Input
- MAX 75,000 Sensors (MAX 250 Tools,30,000 Spin Units) with 3,750 Interface Controllers- Multi Bands Outputs : Max 3 Upper & LowerLimit 'Alarm/Warning' and 1 Upper & 1 Lower Limit 'Interlock/Stop'
- FDC Option Support Available
Qualification and Installation Acheivement Records
Wafer FABs in North America, P.R. China, Japan and Singapore
Other Applications
Semiconductor Manufacturing Application
- Spin Scrubbing Cleaning System
- Wet Station
- Spin Etch System
- CVD Liquid Gas Flow Monitoring
- CMP Slurry Supply System and Chemical Supply System
Flat Panel Display Manufacturing Application
Bio Industry Application
Medial Industry Application
Construction Industry Application
<< Lithography >>
200mm (8inch) flatzone wafer with Wafer Loader Type2(A3), 6 inch reticle
WaferLoader Type2 (A3), Flat Zone Type can be applicable for both Wafer FABand LED/PSS FAB.
Currently Power-up, Initialized Condition inClean Room, Source Inspection is available in Clean Room Facility
Lamp Power Intensity & Uniformity Test available while source inspection
Nikon OEM original HDD in Work Station and Lens Data available
U$1,650,000.00 each (As-is power-up & InitializedCondition, No Warranty, Where-is)
ASML XT1700Fi Spare Parts
ASML PAS5500/300C Spare Parts - Lens Unit and Cable Assembly
[TEL Clean Track ACT 8 Photo Resist Coat and Develop Systems ]
TEL Clean Track ACT 8 Dual Block (200mm, 8') with 4Coat(2COT+2BCT) + 4Develop + 1Interface
4UNC/Uni-Cassettes (Open Cassette)Indexers, ASMLInterfaced, Full Oven Configuration with 6 PHPs, Right to Left Wafer Flow - 1 set
U$1,250,000.00 each (As-is cold-down, No Warranty, Where-is)
*Option : New SMIF CSB - 3SUCs (3 SMIF Indexers) or 4SUCs (4SMIF Indexers) is available at additional cost.
TEL Clean Track ACT 8 Dual Block (200mm, 8') with SMIF CSB, 4Coat(2COT+2BCT) + 4Develop + 1Interface
4SUCs, 4 SMIF Indexers, ASMLInterfaced, 4 PHPs, Right to Left Wafer Flow - 1 set
U$1,150,000.00 each (As-is cold-down, No Warranty, Where-is)
TEL Clean Track ACT 8 Dual Block (200mm, 8') with 4Coat(2COT+2BCT) + 4Develop + 1Interface
4UNC/Uni-Cassettes (Open Cassette)Indexers, ASMLInterfaced, 4 PHPs, Right to Left Wafer Flow - 1 sets
U$1,150,000.00 each (As-is cold-down, No Warranty, Where-is)
*Option : New SMIF CSB - 3SUCs (3 SMIF Indexers) or 4SUCs (4SMIF Indexers) is available at additional cost.
TEL Clean Track ACT 8 Dual Block (200mm, 8') with Open Cassette CSB, 4Coat(4COT) + 4Develop + 1Interface
4UNC/Uni-Cassettes (Open Cassette)Indexers, Nikon Interfaced, Left to Right Wafer Flow - 1 set
U$1,150,000.00 each (As-is cold-down, No Warranty, Where-is)
*Option : New SMIF CSB - 3SUCs (3 SMIF Indexers) or 4SUCs (4SMIF Indexers) is available
Amat P5000 Cvd Manual Download
at additional cost.TEL Clean Track ACT 8 Dual Block (200mm, 8') with Open Cassette CSB, 3Coat(3COT) + 4Develop + 1Interface
4UNC/Uni-Cassettes (Open Cassette)Indexers, Canon DUV Scanner Interfaced, Left to Right Wafer Flow - 1 set
U$1,150,000.00 each (As-is cold-down, No Warranty, Where-is)
*Option : New SMIF CSB - 3SUCs (3 SMIF Indexers) or 4SUCs (4SMIF Indexers) is available at additional cost.
TEL Clean Track ACT 8 Single Block (200mm, 8') with 2Coat(1COT+1TCT) + 2Develop + 1Interface
4UNCs/Uni-Cassettes (OpenCassette) Indexers, ASML Interfaced, Right to Left Wafer Flow - 4 sets
U$680,000.00 each (As-is cold-down, No Warranty, Where-is)
*Option : New SMIF CSB - 3SUCs (3 SMIF Indexers) or 4SUCs (4SMIF Indexers) is available at additional cost.
TEL Clean Track ACT 8 Single Block (200mm, 8') with 2Coat(1COT+1TCT) + 2Develop + 1Interface
4UNCs/Uni-Cassettes (OpenCassette) Indexers, Canon Interfaced, Left to Right Wafer Flow - 1 set
U$680,000.00 each (As-is cold-down, No Warranty, Where-is)
*Option : New SMIF CSB - 3SUCs (3 SMIF Indexers) or 4SUCs (4SMIF Indexers) is available at additional cost.
[TEL Clean Track ACT 12 Photo Resist Coat and Develop Systems ]
TEL Clean Track ACT 12 Single Block (300mm, 12')with 1Coat + 2Develop + 1Interface, Vintage 1998, S/N E180012
U$600,000.00 each (As-is, No Warranty, Where-is)
TEL Clean Track ACT 12 Single Block (300mm, 12') with1PCT(Polyimide Coat) and 1PDV(Polyimide Develop), Vintage 1998, S/N E180022
U$550,000.00 each (As-is, No Warranty, Where-is)
[TEL Clean Track Mark 8 Photo Resist Coat and Develop Systems ]
TEL Clean Track Mark 8 Single Block (200mm, 8')
with 2Coat +2Develop + 1Interface (ASML Stepper, Right toLeft Wafer Flow), Vintage 1996, S/N MD816961
U$480,000.00 each (As-is, No Warranty, Where-is)
TEL Clean Track Mark 8 Single Block (200mm, 8')
with 2Coat +2Develop + 1Interface (ASML Stepper, Right to Left Wafer Flow), Vintage 1996
U$450,000.00 each (As-is, No Warranty, Where-is)
TEL Clean Track Mark 8 Single Block (200mm, 8')
with 2Coat +1Develop, Vintage 1996, S/N MD816908
U$380,000.00 each (As-is, No Warranty, Where-is)
[TEL Clean Track Mark 7 Photo Resist Coat and Develop Systems ]
TEL Clean Track Mark 7 Dual Blocks (200mm, 8')
with2Coat + 3Develop + 1Interface (ASML Stepper, Right to Left Wafer Flow), Vintage 1997, S/N MD727987
U$530,000.00 each (As-is, No Warranty, Where-is)
TEL Clean Track Mark 7 Dual Blocks (200mm, 8')
with 5 Develop (2Develop + 3Develop), 3 sets, Vintage 2000 (2 sets) and 2001 (1 set)
U$435,000.00 each (As-is, No Warranty, Where-is)
TEL Clean Track Mark 7 Single Block (200mm, 8')
with 1Scrubber + 1Coat+ 2Develop + 1Interface (Canon Stepper, Left to Right Wafer Flow)
U$435,000.00 each (As-is, No Warranty, Where-is)
TEL Clean Track Mark 7 Single Block (200mm, 8') with 4 Develop, Vintage 1999
U$380,000.00 each (As-is, No Warranty, Where-is)
TEL Clean Track Mark 7 Single Block (200mm, 8') with 3 Develop
U$350,000.00 each (As-is, No Warranty, Where-is)
TEL Clean Track Mark 7 Single Block (200mm, 8') with 3 Polyimide PIQ Coat
U$380,000.00 each (As-is, No Warranty, Where-is)
TEL Clean Track Mark 7 Single Block (200mm, 8') with 2 Coat + 1 Blank/Reserve
U$335,000.00 each (As-is, No Warranty, Where-is)
[DNS 80A, 80B Photo Resist Coat and Develop Systems ]
DNS80B (200mm, 8') Photo Resist Coat & Develop System(1Coat + 2Develop + 1Interface :Coat-Develop-Interface) - 1 set
U$250,000.00 each (As-is, No Warranty, Where-is)
DNS 80B (150mm, 6') Photo Resist Develop System (2Develop :Blank-Develop-Develop) - 1 set
U$175,000.00 each (As-is, No Warranty, Where-is)
DNS80A (SKW-80A-BVPE, 200mm, 8') Photo Resist Coat & Develop System(2Develop + 1Coat + 1Interface :Blank-Develop-Develop-Coat-Interface) - 2 sets
U$85,000.00 each (As-is, No Warranty, Where-is)
DNS SC-W80A-AVFG (200mm, 8') SOG Coat and Vertical Furnace System (2Coat + 1Vertical Furnace)
with New Controller and Windows GUI OS basedScheduler Software
1) AllBrand New Conventional Electrical Components (Spin Motor/Driver, Servo Motor/Driver, I/O Boards) and Main Controller
withNew Scheduler Software (Windows GUI OS).
2) Low TCO/Total Cost of Ownership onSpare Parts
DNSSS-W80A-AVFG SOG parts are end of production.
3) OnlineCommunication Option (SECS/GEM, GEM300) in Scheduler Software
DNSSC-W80A, SC-W80B requires additional DNS OEM Hareware and Software License for FABOnlineCommunication.
4) Advanced Features
A.RealTime Wafer Log Tracking System per Each Wafer, AutoBack-upSystem
B.WaferLevel Recipe Processing, Multi Recipe/Job Processing per Cassette (MAX25 Recipes per 1 Cassette)
C. Automatic Wafer Collection Feature
D.Wireless/WiFi Remote Monitoring Feature
E.Auto Teaching Feature
F.Easy Recipe Editing Feature
<< Clean >>
U$535,000.00 each (As-is, No Warranty, Where-is)
KDNS SS-W80A-AR (200mm, 8') Spin Scrubber, 2 Front + 2Back + 2 Reverse, D-Sonic
U$535,000.00 each (As-is, No Warranty, Where-is)
KDNS SS-W80A-AR (200mm, 8') Spin Scrubber, 2 Front + 2Back + 2 Reverse, High Pressure Jet
U$535,000.00 each (As-is, No Warranty, Where-is)
DNS SS-W80A-AR (200mm, 8') Spin Scrubber, 1 Front + 3 Back + 1 Reverse, HighPressure Jett
U$580,000.00 each (As-is, No Warranty, Where-is)
KDNS SS-W80A-AR (200mm, 8') Spin Scrubber, 4 Front, NanoSpray
U$435,000.00 each (As-is, No Warranty, Where-is)
DNS SS-W80A-AR (200mm, 8') Spin Scrubber, 4 Front, NanoSpray - 2 sets
U$435,000.00 each (As-is, No Warranty, Where-is)
DNS SS-W80A-AR (200mm, 8') Spin Scrubber, 4 Front, High Pressure Jet
U$435,000.00 each (As-is, No Warranty, Where-is)
DNS SS-W80A-AR (200mm, 8') Spin Scrubber, 3 Front + 1 Blank, D-Sonic
U$420,000.00 each (As-is, No Warranty, Where-is)
DNS SS-W80A-AR (200mm, 8') Spin Scrubber, 3 Front + 1 Blank, HighPressure Jet
U$420,000.00 each (As-is, No Warranty, Where-is)
DNS SS-W80A-AR (200mm, 8')Through-put Upgraded Spin Scrubber
with New Controller and Windows GUI OS basedScheduler Software
3 FrontSides (Nano-Spray + PVA Brush), 3 Back Sides (Nano-Spray), 2 ReverseUnits
2 FrontSides (Nano-Spray + PVABrush), 2 Back Sides (Nano-Spray), 2 ReverseUnits
1) AllBrand New Conventional Electrical Components (Spin Motor/Driver, ServoMotor/Driver, I/O Boards) and Main Controller & Touch Panel
withNew Scheduler Software (Windows GUI OS).
2) Low TCO/Total Cost of Ownership onSpare Parts
DNSSS-W80A-AVFG SOG parts are end of production.
3) HighThrough-put/WPH : 270Wafers/hour (WPH) for 4 Front Side Configuration (35sec Processing Time per each chamber)
58.8%increased from WPH of DNS SS-W80A-AR
22.7%increased from WPH of DNS SS-W80B-AR
4) HighThrough-put/WPH : 135Wafers/hour (WPH) for 2 Front + 2 Back Side Configuration (35sec Processing Time per eachchamber)
35.0%increased from WPH of DNS SS-W80A-AR
12.5%increased from WPH of DNS SS-W80B-AR
5) SmallFoot Print (No External AC Power Transformer Required.)
6) SpeedControl Feature on Scanning Arm at Scrubbing Units for High Throughput
7) OnlineCommunication Option (SECS/GEM, GEM300) in Scheduler Software
while DNSSC-W80A, SC-W80B requires additional DNS OEM Hareware and Software License for FABOnlineCommunication.
8) Advanced Features
A.RealTime Wafer Log Tracking System per Each Wafer, AutoBack-upSystem
B.WaferLevel Recipe Processing, Multi Recipe/Job Processing per Cassette (MAX25 Recipes per 1 Cassette)
C. Automatic Wafer Collection Feature
D.Flexible Loading/Unloading Option (4 ports)
Usercan designate any Cassette Slot/Port as Loading Slot/Port or UnloadingSlot/Port
Note: 25 slots per Cassette (or Port)
E.Wireless/WiFi Remote Monitoring Feature
F.Auto Teaching Feature
G.Easy Recipe Editing Feature
H.LockingBar on Cassette Station to avoid Operator's Mistake to pick up Unfinished Lot/Cassette(Non-SMIF only)
<< Etch >>
AMAT DPS II Metal Etcher (300mm, 12') with 3 DPS IIChambers and 2 Axiom Chambers - 1 set
S/N 416521, Vintage 2008
U$1,000,000.00 each (As-is,NoWarranty, Where-is)
AMAT Centura WxP (Tunngsten Etch Back) Chambers (200mm, 8'), 4sets
U$75,000.00 each (As-is, NoWarranty, Where-is)
Novellus-Gasonics A3010 Dry Asher (200mm, 8')
U$100,000.00 each (As-ispower-up, Initialized Condition, No Warranty, Where-is)
<< CVD >>
U$180,000.00 each (As-is, NoWarranty, Where-is)
<< RTP >>
Mattson AST 3000 RTP (200mm, 8') - 1 set
S/N99050526, Vintage 2000, Operational Condition
U$538,000.00 each (As-ispower-up, Initialized Condition, No Warranty, Where-is)
Mattson AST 2800 RTP (200mm, 8') - 1 set
S/N94060103, Vintage 1994
U$320,000.00 each (As-is, NoWarranty, Where-is)
<< Metrology >>
Nicolet ECO-1000s FT-IR - 1 setS/NACO9601046, Vintage 1996
U$20,000.00 each (As-is, NoWarranty, Where-is)
SDI SPV-1050 Contamination Monitoring System - 1set
S/N96-060121, Vintage 1996
U$20,000.00 each (As-is, NoWarranty, Where-is)
<< Others >>
Asyst Spartan EFEM Wafer Metrology Sorter (300mm, 12') with 2 FOUPports - 1 set
S/N 09-3508-001449,Vintage 1997
U$150,000.00 each(As-is, No Warranty, Where-is)
Asyst PST100 SMIF Integrated Wafer MetrologySorter (200mm, 8') with 2 SMIF Ports + 1 Open Cassette Plate - 2 sets, Vintage 1996
U$100,000.00 each (As-is, NoWarranty, Where-is)
Axcelis-Fusion GPS Dual Chamber UV Stabilizer/Bake (200mm, 8') - 1 set (Some parts missing)
U$100,000.00 each (As-is, NoWarranty, Where-is)
Axcelis-Fusion 200PCU Single Chamber UV Stabilizer/Bake (200mm, 8', Bolt-in SMIF) - 1 set
U$65,000.00 each (As-is, NoWarranty, Where-is)
Axcelis-Fusion (M)200PCU Single Chamber UV Stabilizer/Bake (200mm, 8') - 4 sets
U$55,000.00 each (As-is, NoWarranty, Where-is)
<< Back-End >>
Heavy Smoker for DFD6361 Dicing Saw System
1 set, Vintage 2006,Operational Condition
NGK Maggcon II, CO2 Bubbler, RCII-2000ACD-S forDFD6361 Dicing Saw System
1 set,Vintage 2006, Operational Condition
Disco DSC141 Spin/Rinse/Drying Cleaner (200mm, 8')
1 set,Vintage 2006, Operational Condition
Nitto-Denko HR8500 II Detaper (Tape Remover) with UV Unit
200mm(8'), Vintage 1994, S/N N037H96, As-is Intialized Condition
U$88,000.00 each (As-is, NoWarranty, Where-is)
Nitto-Denko HR8500 II Detaper (TapeRemover) without UV Unit
200mm(8'), Vintage 1994, S/N OMNB777, NIL Touch Panel Controller Missing
U$85,000.00 each (As-is, No Warranty, Where-is)
Nitto-Denko HR8500 II Detaper (TapeRemover) with UV Unit
200mm(8'), Vintage 1994, S/N K095E94, Some Parts Missing
Nitto-Denko DR8500 II Taper (TapingSystem, Laminator, Wafer Mounting System)
200mm(8'), Vintage 1994, S/N K087E94
U$85,000.00 each (As-is, No Warranty, Where-is)
Nitto-Denko DR8500 II Taper (TapingSystem, Laminator, Wafer Mounting System)
200mm(8'), Vintage 1995, S/N L248E95, Some Parts Missing
Takatori ATRM-2100 Detaper (Tape Remover),200mm(8'), Vintage 1997
U$40,000.00 each (As-is, No Warranty, Where-is)
Takatori ATM-8100 Detaper (Tape Remover),200mm(8'), Vintage 1996
U$40,000.00 each (As-is, No Warranty, Where-is)
Lintec RAD2000/F8, UV Irradiator for Detaping System
S/N D6S-20006-LW,Vintage 1996
U$40,000.00 each (As-is, No Warranty, Where-is)
<< ATE >>
Accertech-TSK UF200SA 200mm Automatic Wafer Probe Station with Manipulator
U$85,000.00 each (As-ispower-up, Initialized Condition, No Warranty, Where-is)
Inspection available with Power-up and Initialization
TEL P-12XL 300mm Automatic Wafer Probe Station with Manipulator
U$105,000.00 each (As-ispower-up, Initialized Condition, No Warranty, Where-is)
Inspection available with Power-up and Initialization
HELIX CTI-Cryogenetics On-Board 8F Cryo Pump, 15 sets
HELIX CTI-Cryogenetics Cryo Compressor 9600, 4 sets
S/N E08754276, Elapsed Time Meter 3,371.1H, He ChargePressure at On/Off Condition is all within SPEC, @U$7,500.00each
S/N D06456510, Elapsed Time Meter 23,877.9H, He ChargePressure at On/Off Condition is all within SPEC, @U$7,000.00each
S/N J02119034, Elapsed Time Meter 50,028.4H, He ChargePressure at On/Off Condition is all within SPEC, @U$6,500.00 each
S/N K02119255, Elapsed Time Meter 50,030.8H, He ChargePressure at On/Off Condition is all within SPEC, @U$6,500.00 each
HELIX CTI-Cryogenetics Cryo Compressor 8510, 9 sets
HELIX CTI-Cryogenetics Cryo Compressor 8500, 1 set
<< Turbo Modular Pumps and Controllers >>
Edwards - Seiko Seiki MG-STPH600G-T62B, 1 set
Edwards - Seiko Seiki MG-STPH600C-T62C, 1 set
Edwards - Seiko Seiki STP-H600C1, 1 set
Edwards - Seiko Seiki STP301, 3 sets
<< Dry Pumps and Roughing Pumps >>
Edwards iH600, 18 sets
Edwards iH80, 6 sets
Edwards iGX6/100M 200V, 4 sets
Edwards iGX6/100N 200V, 1 set
Edwards iQDP80 + QMB500, 15 sets
Edwards iQDP80 + QMB250, 4 sets
Edwards iQDP80, 11 sets
Edwards QDP80, 2 sets
Edwards QDP80 + QMB500, 1 set
Edwards iQDP40, 6 sets
Edwards QDP40, 4 sets
Edwards Pump Display Module Terminal, 8ea
Edwards Pump Interface Module P/N A52844460, 10ea
Edwards Pump Interface Module P/N D37215000, 11ea
Edwards Pump Interface Module P/N A52844413, 2ea
Edwards Pump Overcurrent Protection Unit P/N A38054210, 1ea
Edwards Pump Overcurrent Protection Unit P/N A38054220, 1ea
Edwards Pump Overcurrent Protection Unit P/N N38054005, 1ea
Edwards Pump Overcurrent Protection Unit P/N N38054005 with Pump Rack, 1ea
Edward Pump Rack, 10 sets
Ebara 80x25, 3 sets
S/N DPD-932464, @U$3,000.00 each
S/N DPD-956237, @U$3,000.00 each
S/N DPD-956196, @U$3,000.00 each
Ebara 40x20, 2 sets
S/N DPA-932514, @U$2,000.00 each
S/N DPA-932586, @U$2,000.00 each
Ebara A150W-T, 3 sets
Ebara A70W, 4 sets
Ebara A30W, 3 sets
Alcatel ADS501, 15 sets
Leybold WSU501, 2 sets
Kashiyama SD90V, 1 set
<< Heat Exchanger >>
AMAT 0 Heat Exchanger (0221-10785 REV B), 1 set
S/N 33996-01, @U$4,000.00 each
<< Chiller >>
Lam Research TCU2080 Dual Channel Chiller, 2 sets
M&W RPC2 Dual Channel Chiller, 6 setsNeslab HX150+W/C Chiller, 5 sets
SMC INR-341-54C Chiller, 2 sets
Cosam BCU-B952LT Chiller, 2 sets
Cosam BCU-E152RSD-AMLR Chiller, 1 set
Cosam BCU-E152RSE-AMAT Chiller, 2 sets
FST FST/C-HS308H Chiller, 1 set
Lasemtech BCU-A512-K Chiller, 1 set
Lasemtech BCU-E110RS-COM Chiller, 3 sets
Speed Engineering SPEED-800A Chiller, 1 set
Refurbishment,Modificiation, Upgrade and Installation/Start-up Service
TEL Lithius, Lithius i, Lithiusi+, Lithius Pro - 300mm(12') Photo Resist Coat/Develop System
UpgradedOven Exhaust to extend PM frequency and Minimize Coating Failure Issues
UpgradedCatch Cup for Coat Unit to extend PM frequency and Minimize CoatingFailure Issue
UpgradedWafer Guide Assembly to extend its Life Time.
Sokudo RF3, RF3S, RF Duo -300mm(12') Photo Resist Coat/Develop System
UpgradedOven Exhaust to extend PM frequency and Minimize Coating Failure Issues
UpgradedWafer Guide Assembly to extend its Life Time.
TEL Clean Track ACT 12 PhotoResist Coat and Develop System
SpareParts, Full Refurbishment,Modification, Upgrade, Start-up/Installation and Warranty Service
HighThrough-put Upgraded PRA, CRA, IRA
UpgradedOven Exhaust to extend PM frequency and Minimize Coating Failure Issues
UpgradedCatch Cup for Coat Unit to extend PM frequency and Minimize CoatingFailure Issue
UpgradedWafer Guide Assembly to extend its Life Time.
TEL Clean Track ACT 8 PhotoResist Coat and Develop System
SpareParts, Full Refurbishment,Modification, Upgrade, Start-up/Installation and Warranty Service
New SMIFCSB/Cassette Station Block (3 Indexers Type or 4 Indexers Type)
HighThrough-put Upgraded PRA, CRA, IRA
TEL Clean Track Mark II, V, Vz, 7, 8 PhotoResist Coat and Develop System
SpareParts, Full Refurbishment,Modification, Upgrade, Start-up/Installation and Warranty Service
New SMIFCSB/Cassette Station Block (3 Indexer Type)
Amat P5000 Cvd Manual Pdf
DNS SS-W80A-AR, SS-W80B-AR Wafer SpinScrubbing System
SpareParts, Full Refurbishment,Modification, Upgrade, Start-up/Installation and Warranty Service
DNS 636, 629, 60A, 60B, 80A, 80B PhotoResist Coat and Develop System
SpareParts, Full Refurbishment,Modification, Upgrade, Start-up/Installation and Warranty Service
SVG Photo Resist Coat and Develop System
SpareParts, Full Refurbishment,Modification, Upgrade, Start-up/Installation and Warranty Service
Nikon g-line, i-line, DUV Step/Scanner
SpareParts, Full Refurbishment,Modification, Upgrade, Start-up/Installation and Warranty Service
Ebara EPO2228, FREX200 CMP System
SpareParts, Full Refurbishment, Modification, Start-up/Installation andWarranty Service
KLA-Tencor-Thermawave TP Series and OPSeries
SpareParts, Full Refurbishment, Modification, Start-up/Installation andWarranty Service
Hitachi S6XXX, S8XXX, S9XXX CDSEM, FESEMand FEI-Philips XL series FESEM
SpareParts, Full Refurbishment, Modification, Start-up/Installation andWarranty Service
AMAT P5000, Centura, Centura II Etch, CVDand Endura 5500 PVD and Mirra CMP System Series
SpareParts, Full Refurbishment,Modification, Upgrade, Start-up/Installation and Warranty Service
Lam Research Rainbow, TCP, A6 Etch SystemSeries
SpareParts, Full Refurbishment,Modification, Upgrade, Start-up/Installation and Warranty Service
Varian 120XP, 160XP, E1000, 300XP, 350D,E220, E500, VIISta, VIISion Ion Implant System
SpareParts, Full Refurbishment, Modification, Start-up/Installation andWarranty Service
Axcelis-Eaton NV6200, NV6200A, NV6200AV,NV10-160, NV10-180, NV-GSD Ion Implant System
SpareParts, Full Refurbishment, Modification, Start-up/Installation andWarranty Service
Axcelis-Fusion 150PC, 200PCU, M200PCUPolo, Gemini UV Stabiliztion/Bake System Series
FullRefurbishment, Start-up/Installation and Warranty Service
Mattson SHS2800, SHS2900 and AG Associate4104, 8108 Single Chamber RTP Series
SpareParts, Full Refurbishment, Modification, Start-up/Installation andWarranty Service
All Dry Ashing System : Novellus-Gasonics,Ramco, PSC Series
SpareParts, Full Refurbishment, Modification, Start-up/Installation andWarranty Service
New Automatic, Semi-Auto and Manual WetBench/Station
DNS, Sugai, Kaijo, SES, SEZ and Akrion WetStation Series
SpareParts, Full Refurbishment, Modification, Start-up/Installation andWarranty Service
New WMS/Wafer Metrology Sorter (up to300mm wafer size)
Asyst, Rorze and Other Makers WMS/WaferMetrology Sorter
SpareParts, Full Refurbishment, Modification, Start-up/Installation andWarranty Service
Accretech-TSK (A-PM-90A, UF200, UF200S, UF200SA,UF3000) Prober
SpareParts, Full Refurbishment, Modification, Start-up/Installation andWarranty Service
Upgraded toCold Chuck (-40'C) with Chiller
Modificationfor Square Type of Probe Card Holder
TEL (P-8, P-8XL, P-12XL, P-12XLn)
SpareParts, Full Refurbishment, Modification, Start-up/Installation andWarranty Service
Upgraded toCold Chuck (-40'C) with Chiller
Modificationfor Square Type of Probe Card Holder
Disco Back Grinder (DFG840, DFG8540)
SpareParts, Full Refurbishment, Modification, Start-up/Installation andWarranty Service
SpareParts, Full Refurbishment, Modification, Start-up/Installation andWarranty Service
Disco, K&S and TSK Dicing Saw
SpareParts, Full Refurbishment, Modification, Start-up/Installation andWarranty Service